Abstract
Simultaneous electrochemical etching of deep pores and trenches in silicon
was used to fabricate a two-dimensional, photonic crystal slab (PCS). The
structure consists of five rows of macro-pores on both sides of a trench-defect,
filled with a nematic liquid crystal. Polarized reflection and transmission
spectra from the fabricated structure were investigated in the mid-infrared
spectral range and were compared with spectra calculated using a scattering
matrix method. In order to obtain agreement between the experimental and calculated
spectra, a model structure with a complex refractive index of silicon was
introduced. This enabled us to take into account losses related to light scattering
at the inner surfaces of pores and trenches within the structure. The influence
of these losses on the amplitude of the defects and surface Tamm states was
analysed using this model. The Tamm states originate from the unstructured
Si layer at the interface of the structure and the external medium, air in
this case. A quantitative evaluation of the losses was performed by extracting
a coefficient from a fit to the experimental spectra. This coefficient was
utilised to determine the dependence of the micro-cavity parameters on the
number of periods in the PCS. We conclude that a micro-cavity based on macro-porous
silicon should not have more than three periods on each side of a defect.
© 2013 IEEE
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