Abstract
Silicon-oxynitride waveguides fabricated by plasma-enhanced chemical
vapor deposition are very attractive for passive optical components used in
optical networks. We use a combination of an high-index contrast and compact
core dimensions for the realization of small bending radii. To achieve the
high quality requirements with the desired waveguide design the layer deposition
and the waveguide fabrication are optimized. Furthermore, we discuss the interface
of the high-index optical components to standard single-mode fiber (SSMF)
and coupling tolerances, which is more difficult compared to common fiber-mode-matched
waveguides. We show results of fabricated Mach-Zehnder
interferometer-switches, tunable ring resonators and present a solution to
reduce the waveguide birefringence by adjusting the mechanical stress of the
cover layer.
© 2009 IEEE
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