Abstract
We investigate reactive fluorine atom spectroscopic characterization in
atmospheric pressure of He/SF6 plasma using atomic emission spectrometry. As input
radio frequency (RF) power levels are raised from 140 to 220 W, the emission spectra
of 685.60 (3p4D-3s4P transition) and 739.87 nm (3p4P-3s4P transition) increase
significantly. Moreover, an optimal value of SF6 volume concentration in the
production of fluorine radicals, which is 0.8% is achieved. Addition of certain
amounts of O2 into He/SF6 plasma results in the promotion of SF6 dissociation.
Emission intensities of fluorine atoms show the maximum at the O<sub>2</sub>/SF<sub>6</sub> ratio of 0.4.
© 2011 Chinese Optics Letters
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