Abstract
A novel optical excitation and detection apparatus was used to investigate the characteristics of silicon micro-resonators, which was activated into vibration by a laser beam irradiation. The beam diameter of the excitation light was less than 10 'mu'm. The vibration amplitude of the resonator was detected by the interferometer with high resolution of 0.1 nm and measurement repeatability of less than 3 nm. The resonant frequency of the micro-resonator was obtained to be 8.75 kHz with full-width at half-maximum (FWHM) of 0.18 kHz. It is shown that the method is useful and reliable for measuring micro-displacement and micro-vibration of minute objects with nanometer accuracy.
© 2005 Chinese Optics Letters
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription