Abstract
We design a new kind of phase zone plates (PZPs) to improve the
diffraction efficiency of soft x ray zone plates (ZPs). The design
replaces blank parts of PZPs with metals of negative phase shift at the
working energy, which is called as the positive and negative PZPs
(PNPZPs). According to the calculation, PNPZPs have a higher maximum
efficiency than conventional ZPs with the same zone width. With the help
of a negative phase coefficient, it is much easier to achieve a π phase
shift in one period, resulting in a smaller zone height. This design can
help fabricate finer PZPs to achieve a better image resolution.
© 2017 Chinese Laser Press
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