Abstract

Infrared reflection-absorption spectra of plasma-enhanced chemical vapor deposition (PECVD) amorphous TiO₂ thin films on aluminum were obtained with <i>s</i>- and <i>p</i>-polarized light and oblique incidence angles. Such spectra were analyzed by means of spectral simulations based on a Fresnel equation for a three-layered system. The optical constants used in the simulations were obtained through the Kramers-Krönig analysis of the reflectance spectra of a pellet of powdered amorphous TiO₂. LO-TO energy-loss functions were also calculated from these optical constants, and a splitting was observed. A good qualitative agreement between experimental and simulated spectra was achieved, and the Berreman effect was observed in both cases when <i>p</i>-polarized light was used. It was shown, therefore, that the Berreman effect makes infrared reflection-absorption spectroscopy a successful technique for the characterization of an amorphous TiO₂ thin layer on aluminum.

Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride

Jan Kischkat, Sven Peters, Bernd Gruska, Mykhaylo Semtsiv, Mikaela Chashnikova, Matthias Klinkmüller, Oliana Fedosenko, Stephan Machulik, Anna Aleksandrova, Gregorii Monastyrskyi, Yuri Flores, and W. Ted Masselink
Appl. Opt. 51(28) 6789-6798 (2012)

Optical properties of spin-on deposited low temperature titanium oxide thin films

J. T. Rantala and A. H. O. Kärkkäinen
Opt. Express 11(12) 1406-1410 (2003)

Room-temperature deposition of amorphous titanium dioxide thin film with high refractive index by a filtered cathodic vacuum arc technique

Zhiwei Zhao, Beng Kang Tay, and Guoqing Yu
Appl. Opt. 43(6) 1281-1285 (2004)

Experimental observation of Berreman modes in an uniaxial anisotropic nanoporous alumina film on aluminum substrate

Dheeraj Pratap, Jitendra Kumar Pradhan, and S. Anantha Ramakrishna
Opt. Lett. 47(10) 2554-2557 (2022)

Effect of substrate overetching and heat treatment of titanium oxide waveguide gratings and thin films on their optical properties

Muhammad Rizwan Saleem, Seppo Honkanen, and Jari Turunen
Appl. Opt. 52(3) 422-432 (2013)