Abstract

In this work, a modal analysis of reverse rib waveguide (RRW) structures based on a silica-titania platform is carried out. The silica-titania waveguide films can be deposited via the sol-gel method and dip-coating technique. To combine this low-cost deposition technique with the economical fabrication method, we propose to structure the samples via wet-chemical etching. Due to the isotropic nature of wet etching, the waveguide architecture with rounded sidewalls is considered to model the RRW. Additionally, the modal conditions and bending loss are compared with the RRW with vertical sidewalls. It is assumed that this study will be beneficial for comprehending the modal conditions of waveguide structures with perfectly vertical and rounded sidewalls.

© 2023 Optica Publishing Group

Development of a low-cost silica-titania optical platform for integrated photonics applications

M. A. Butt, C. Tyszkiewicz, P. Karasiński, Magdalena Zięba, D. Hlushchenko, T. Baraniecki, A. Kaźmierczak, R. Piramidowicz, M. Guzik, and A. Bachmatiuk
Opt. Express 30(13) 23678-23694 (2022)

Fabrication of buried channel waveguides on silicon substrates using spin-on glass

A. S. Holmes, R. R. A. Syms, Ming Li, and Mino Green
Appl. Opt. 32(25) 4916-4921 (1993)

Double layer SiO₂–TiO₂ sol–gel thin films on glass for antireflection, antifogging, and UV recoverable self-cleaning

F. M. Fardo, R. S. Ribeiro, J. A. Strauss, J. Nardi, L. C. Ferreira, G. Schmökel, T. M. H. Costa, M. B. Pereira, and F. Horowitz
Appl. Opt. 59(25) 7720-7725 (2020)

Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon

Zian He, Yigang Li, Yingfeng Li, Yanwu Zhang, Liying Liu, and Lei Xu
Opt. Express 16(5) 3172-3177 (2008)

Deposition and characterization of silica-based films by helicon-activated reactive evaporation applied to optical waveguide fabrication

Douglas A. P. Bulla, Wei-Tang Li, Christine Charles, Rod Boswell, Adrian Ankiewicz, and John Love
Appl. Opt. 43(14) 2978-2985 (2004)