Abstract
We propose spectroscopic imaging ellipsometry that can measure spectral ellipsometric signals in the entire field of view simultaneously without areal scanning or operation of polarization devices. The proposed imaging ellipsometry is configured in a coaxial optical structure so that the high magnification objective lens is applicable and the spatial resolution is highly increased. Without the operation of polarization components and to efficiently obtain the spectral data in the object plane, the ellipsometric parameters are encoded into the high frequency in the spectral domain and are measured by an imaging Michelson interferometer. The volumetric thickness measurement by the proposed method was verified by comparing the thickness results of the ${\text{SiO}_2}/\text{Si}$ sample that has four different thicknesses with commercial ellipsometer results.
© 2020 Optical Society of America
Full Article | PDF ArticleMore Like This
Seung Woo Lee, Sin Yong Lee, Garam Choi, and Heui Jae Pahk
Opt. Express 28(18) 25879-25893 (2020)
Mingyu Kim, Seungwoo Lee, and Heuijae Pahk
Appl. Opt. 62(30) 8082-8090 (2023)
Garam Choi, Seung Woo Lee, Sin Yong Lee, and Heui Jae Pahk
Appl. Opt. 59(21) 6296-6303 (2020)