Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining

Sambit Mitra; Margaux Chanal; Raphaël Clady; Alexandros Mouskeftaras; David Grojo

doi:10.1364/AO.54.007358

Applied Optics
Vol. 54,
Issue 24,
pp. 7358-7365
(2015)
•https://doi.org/10.1364/AO.54.007358

Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining

Sambit Mitra, Margaux Chanal, Raphaël Clady, Alexandros Mouskeftaras, and David Grojo

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Sambit Mitra, Margaux Chanal, Raphaël Clady, Alexandros Mouskeftaras, and David Grojo, "Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining," Appl. Opt. 54, 7358-7365 (2015)

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Abstract

We report on a functional experimental design for Bessel beam generation capable of handling high-energy ultrashort pulses (up to 1.2 mJ per pulse of 50 fs duration). This allows us to deliver intensities exceeding the breakdown threshold for air or any dielectric along controlled micro-filaments with lengths exceeding 4 mm. It represents an unprecedented upscaling in comparison to recent femtosecond Bessel beam micromachining experiments. We produce void microchannels through glass substrates to demonstrate that aspect ratios exceeding $1200 ∶ 1$ can be achieved by using single high-intensity pulses. This demonstration must lead to new methodologies for deep-drilling and high-speed cutting applications.

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	Axicon Base Angle (°)
	1	2.5	5	10
$f_{1} = 200 mm$ ( $γ = 8$ )
Beam diameter on L2 (mm)	3.5	8.8	17.7	36.2 (NOK)
Laser intensity on L2 ( $\times 10^{10} W / {cm}^{2}$ )	3.4 (NOK)	1.2 (NOK)	0.6	0.3
Angle of incidence on target (°)	3.5	8.8	17.7	37.3
Peak intensity on target ( $\times 10^{15} W / {cm}^{2}$ )	0.6	1.5	2.9	5.1
Length of Bessel region (FWHM, mm)	10.3	4.1	2	0.99
Central spot diameter on target (μm)	8	3.3	1.79	1.2
$f_{1} = 400 mm$ ( $γ = 16$ )
Beam diameter on L2 (mm)	6.8	17	34 (NOK)	68 (NOK)
Laser intensity on L2 ( $\times 10^{10} W / {cm}^{2}$ )	3.1 (NOK)	1.2 (NOK)	0.6	0.3
Angle of incidence on target (°)	7.3	18.3	36.8	71.7
Peak intensity on target ( $\times 10^{15} W / {cm}^{2}$ )	1.2	2.8	5	–
Length of Bessel region (FWHM, mm)	2.4	0.99	0.52	0.31
Central spot diameter (μm)	4.1	1.8	1.2	–
$f_{1} = 1000 mm$ ( $γ = 40$ )
Beam diameter on L2 (mm)	16.4	41	82.3 (NOK)	166.6 (NOK)
Laser intensity on L2 ( $\times 10^{10} W / {cm}^{2}$ )	3.1 (NOK)	1.2 (NOK)	0.6	0.3
Angle of incidence on target (°)	18.3	45.9	88.4	–
Peak intensity on target ( $\times 10^{15} W / {cm}^{2}$ )	2.8	5.9	–	–
Length of Bessel region (FWHM, mm)	0.39	0.17	0.12	–
Central spot diameter (μm)	1.8	1.2	–	–

Abstract

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Figures (7)

Tables (1)

Equations (2)

Applied Optics