Abstract
The removal of mid-spatial-frequency errors is a challenging issue in most subaperture polishing technologies. A novel “grolishing” technology has been developed to deal with grinding errors of spatial wavelengths from 1 to 50 mm with the help of power spectral density analysis and filter theory. This grolishing process was implemented on Zeeko’s IRP polishing machine, on which all the subsequent polishing was performed. This has greatly reduced the process time. Although different abrasive have been used, the process is self-contained. The process parameters have been optimized to leave an edge upstand of peak-to-valley of 1 μm over a width of 40 mm.
© 2012 Optical Society of America
Full Article | PDF ArticleMore Like This
David Walker, Guoyu Yu, Hongyu Li, Wilhelmus Messelink, Rob Evans, and Anthony Beaucamp
Opt. Express 20(18) 19787-19798 (2012)
David Walker, Wu Hsing-Yu, Guoyu Yu, Hongyu Li, Wang Zhang, and Chunlian Lu
Appl. Opt. 56(36) 9925-9931 (2017)
Hsing-Yu Wu, David Walker, and Guoyu Yu
Opt. Express 27(15) 21856-21871 (2019)