Abstract
Previous implementations of the iterative phase shifting method, in which the phase of a test object is computed from measurements using a phase shifting interferometer with unknown positions of the reference, do not provide an accurate way of knowing when convergence has been attained. We present a new approach to this method that allows us to deterministically identify convergence. The method is tested with a home-built Fizeau interferometer that measures optical surfaces polished to using the Hydra tool. The intrinsic quality of the measurements is better than . Other possible applications for this technique include fringe projection or any problem where phase shifting is involved.
© 2009 Optical Society of America
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