Abstract
A general method for reducing the influence of vibrations in phase-shifting interferometry corrects the surface phase map through a spectral analysis of a “phase-error pattern,” a plot of the interference intensity versus the measured phase, for each phase-shifted image. The method is computationally fast, applicable to any phase-shifting algorithm and interferometer geometry, has few restrictions on surface shape, and unlike spatial Fourier methods, high density spatial carrier fringes are not required, although at least a fringe of phase departure is recommended. Over a reduction in vibrationally induced surface distortion is achieved for small amplitude vibrations on real data.
© 2009 Optical Society of America
Full Article |
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Figures (14)
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Tables (1)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Equations (32)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription