Abstract
We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10° of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at and 64.1% at for the and orders, respectively, which are comparable to the best values obtained yet from a holographic ion-etched blazed grating. This presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable.
© 2006 Optical Society of America
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