Abstract
W∕C and multilayer gratings have been fabricated by depositing a multilayer coating on the surface of laminar-type holographic master gratings. The diffraction efficiency was measured by reflectometers in the energy region of at synchrotron radiation facilities as well as with an x-ray diffractometer at . The and W∕C multilayer gratings showed peak diffraction efficiencies of 0.47 and 0.38 at 6.0 and , respectively. To our knowledge, the peak efficiency of the W∕C multilayer grating is the highest measured with hard x rays. The diffraction efficiency of the multilayer gratings was higher than that of the W∕C multilayer grating in the energy range of . However, it decreased significantly in the energy above the K absorption edge of Co . For the multilayer grating, the measured diffraction efficiencies agreed with the calculated curves assuming a rms roughness of .
© 2006 Optical Society of America
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