Abstract
A promising type of optical pressure sensor combines an integrated
optical interferometer with a micromachined diaphragm on a shared
silicon substrate. We have demonstrated a sensor of this type that
uses an unbalanced Mach–Zehnder waveguide interferometer together with
a broadband source to produce a spectrally encoded
measurement. This spectral encoding mechanism is advantageous as it
is not readily degraded by transmission through optical fibers. We
have also demonstrated a means to obtain a temperature-compensated
pressure measurement by interrogating both polarization eigenmodes of
the interferometer.
© 1998 Optical Society of America
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