Abstract
We report on the design and fabrication of fully 2-D surface relief diffraction elements that can split a single collimated beam into many beams in an arbitrary intensity distribution. These splitters were designed by computer using simulated annealing, and made into phase gratings by electron-beam lithography followed by plasma etching into quartz glass. Both two and four phase level gratings have been fabricated, allowing a wide range of uniform and weighted spot patterns to be generated. These grating elements have a measured diffraction efficiency of over 74%, with the beam intensity ratios accurate to within 1% of their target values.
© 1991 Optical Society of America
Full Article | PDF ArticleMore Like This
Chen Wu, Huarong Gu, Zhehai Zhou, and Qiaofeng Tan
Appl. Opt. 56(31) 8816-8821 (2017)
Luiz Gonçalves Neto, Luciana Brassolatti Roberto, Patrick Verdonck, Ronaldo Domingues Mansano, Giuseppe Antonio Cirino, and Mario Antonio Stefani
Appl. Opt. 40(2) 211-218 (2001)
Mitsuo Takeda and Toshihiro Kubota
Appl. Opt. 30(9) 1090-1095 (1991)