Abstract
We present the theory of a grazing incidence reflection grating capable of imaging at submicron resolution. The optic is mechanically ruled on a spherical or cylindrical surface with varied groove spacings, delivering diffraction-limited response and a wide field of view at a selected wavelength. Geometrical aberrations are calculated on the basis of Fermat’s principle, revealing significant improvements over a grazing incidence mirror. Aplanatic and quasi-aplanatic versions of the grating have applications in both imaging and scanning microscopes, microprobes, collimators, and telescopes. A 2-D crossed system of such gratings, similar to the grazing incidence mirror geometry of Kirkpatrick and Baez, could potentially provide spatial resolutions of ~200 Å.
© 1986 Optical Society of America
Full Article | PDF ArticleMore Like This
A. M. Malvezzi, L. Garifo, and G. Tondello
Appl. Opt. 20(14) 2560-2565 (1981)
Michael C. Hettrick
Appl. Opt. 23(18) 3221-3235 (1984)
Richard C. Chase
Appl. Opt. 15(12) 3094-3098 (1976)