Abstract
A direct phase measurement interferometer designed and constructed to operate at a 3.8-μm wavelength is described. The interferometer uses a deuterium fluoride laser as the light source, zinc selenide transmitting optics, and a 32- × 64-element PtSi infrared CCD detector array with digital processing electronics and a graphics display on a desktop microcomputer. The instrument, which is useful for measuring a figure error caused by thickness variations in dielectric coatings applied to infrared optics, gives a wave front measurement repeatability of <λ/50 rms.
© 1985 Optical Society of America
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