Abstract
Micro-optical structures for VUV laser beam shaping and wave-front sensing were manufactured by thin-film deposition onto and transfer by etching. Arrays of Bessel-like laser beams at a wavelength of 157 nm with extremely small conical angles were generated by microaxicon lenses. Beam propagation was studied in simulations and experiments. Apodization by absorbing layers is proposed for beam cleaning.
© 2004 Optical Society of America
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