Abstract
The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region of 9.5–15.5 nm. The observed transitions were identified as belonging to ions from to . In the region of importance for extreme-ultraviolet lithography around 13.4 nm, the strongest lines were identified as transitions in . The identifications were made by use of energy parameters extrapolated along the isoelectronic sequence.
© 2003 Optical Society of America
Full Article | PDF ArticleMore Like This
M. A. Klosner and W. T. Silfvast
Opt. Lett. 23(20) 1609-1611 (1998)
M. A. Klosner and W. T. Silfvast
J. Opt. Soc. Am. B 17(7) 1279-1290 (2000)
Pascal Mercère, Philippe Zeitoun, Mourad Idir, Sébastien Le Pape, Denis Douillet, Xavier Levecq, Guillaume Dovillaire, Samuel Bucourt, Kenneth A. Goldberg, Patrick P. Naulleau, and Senajith Rekawa
Opt. Lett. 28(17) 1534-1536 (2003)