Abstract
The complex permittivity for Pt, Pd, Ni, and Ti-silicide films as well as heavily doped p- and n-type silicon were determined by ellipsometry over the energy range . Fits to the Drude model gave bulk plasma and relaxation frequencies. Rutherford backscattering spectroscopy, X-ray diffraction, scanning electron microscopy, secondary ion mass spectrometry, and four-point probe measurements complemented the optical characterization. Calculations from measured permittivities of waveguide loss and mode confinement suggest that the considered materials are better suited for long-wavelength surface-plasmon-polariton waveguide applications than metal films.
© 2010 Optical Society of America
Full Article | PDF ArticleMore Like This
Richard Soref, Robert E. Peale, and Walter Buchwald
Opt. Express 16(9) 6507-6514 (2008)
Shiyang Zhu, G. Q. Lo, and D. L. Kwong
Opt. Express 19(17) 15843-15854 (2011)
Evan M. Smith, William H. Streyer, Nima Nader, Shivashankar Vangala, Gordon Grzybowski, Richard Soref, Daniel Wasserman, and Justin W. Cleary
Opt. Mater. Express 8(4) 968-982 (2018)