Abstract
By numerical analysis of the general formulas for standard ellipsometiric measurement, positions of the compensator, polarizer, and analyzer can be found such that the errors of Δ and ψ are minimized. Such optimal conditions can be found for any value of Δ and ψ from plots that are given. The improvement of precision over that of usual methods can be one order of magnitude or better in some Δ, ψ regions.
© 1970 Optical Society of America
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Henian Zhu, Liguo Liu, Yiwu Wen, Zhengde Lü, and Baizhe Zhang
Appl. Opt. 41(22) 4536-4540 (2002)
FRANK L. MCCRACKIN
J. Opt. Soc. Am. 60(1) 57-63 (1970)
Mario Ghezzo
J. Opt. Soc. Am. 58(3) 368-372 (1968)