Abstract
A tolerant single etch-step passive polarization splitter on InP/InGaAsP is designed and fabricated. The
device consists of a directional coupler with a wide and a narrow waveguide. Modal birefringence of the third-order
modes for transverse electric (TE) and transverse magnetic (TM) polarizations is employed to selectively couple one
polarization. Tapering is applied to increase the tolerances. The devices are characterized, and the measurement
results show good agreement with the beam-propagation-method simulations: a splitting ratio larger than 95% for a
width range of around 100 nm and over a large wavelength range, covering at least the C-band.
© 2007 IEEE
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