Abstract
This letter presents a polarimetric interferometer (PI) that can measure the
ellipsometric parameter <i>θ</i> with an accuracy of 0.01° leading to a potential accuracy of 17 pm.
The PI is constructed and compared with a commercial heterodyne interferometer (HI). Given its low
nonlinearity, the PI is used to measure the residual nonlinearity of a heterodyne interferometric
displacement system. A rotating half-wave plate is used to compensate for a part of the nonlinearity
error caused by the misalignment of the axis between input polarizing states and beamsplitter.
© 2013 Chinese Optics Letters
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