Abstract
A two-dimensional thin film thickness model based on the geometry of a commercial coater which can calculate more effectively the profiles of linear variable filters (LVFs) has been developed. This is done by isolating the substrate plane as an independent coordinate (local coordinate), while the rotation and translation matrices are used to establish the coordinate transformation and combine the characteristic vector with the step function to build a borderline which can conclude whether the local mask will block the deposition or not. The height of the local mask has been increased up to 40 mm in the proposed model, and two-dimensional simulations are developed to obtain a thin film profile deposition on the substrate inside the evaporation chamber to achieve the specific request of producing a LVF zone width in a more economical way than previously reported [Opt. Express 23, 5102 (2015) [CrossRef] ].
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Cheng-Hao Ko, Kuei-Ying Chang, and You-Min Huang
Opt. Express 23(4) 5102-5116 (2015)
Laëtitia Abel-Tibérini, Frédéric Lemarquis, and Michel Lequime
Appl. Opt. 47(30) 5706-5714 (2008)
Shun Zhou, Shigeng Song, Sijia Cai, Daxing Han, Zhentao Wu, Jian Song, Bo Lu, Zhengping Jiang, David Lovering, Weiguo Liu, and Des Gibson
Opt. Express 29(14) 21386-21399 (2021)