Abstract
Dark-field illumination provides an imaging mode that rejects specular light, thereby highlighting edge features. We analyze dark-field imaging by using cylindrical vector beam illumination with a confocal microscope equipped with a microstructure fiber mode filter. A numerical model based on rigorous coupled-wave analysis has been used to analyze the method. We acquired images of separated edges features to investigate the edge separation resolution of the method. A through-focus comparison of azimuthal and radial polarization shows a measurable dependence of edge separation on polarization.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Xiaoyu Weng, Xiumin Gao, Hanming Guo, and Songlin Zhuang
Appl. Opt. 53(11) 2470-2476 (2014)
K. S. Youngworth and T. G Brown
Opt. Express 7(2) 77-87 (2000)
J. Fulmes, D. A. Gollmer, S. Jäger, C. Schäfer, A. Horrer, D. Zhang, P.-M. Adam, A. J. Meixner, D. P. Kern, and M. Fleischer
Opt. Express 26(12) 14982-14998 (2018)