Abstract
Single layer magnesium fluoride was deposited on fused-silica substrates by a molybdenum boat evaporation process at . The formation of various microstructures in relation to the different substrate temperatures and deposition rates were investigated. The relation between these microstructures (including cross-sectional morphology, surface roughness, and crystalline structures), the optical properties (including refractive index and optical loss) and stress, were all investigated. It was found that the laser-induced damage threshold (LIDT) would be affected by the microstructure, optical loss, and stress of the thin film. To obtain a larger LIDT value and better optical characteristics, films should be deposited at a high substrate temperature and at a low deposition rate .
© 2006 Optical Society of America
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