Abstract
White-light interferometry is a well-established method for measuring the height profiles of samples with rough as well as with smooth surfaces. Because white-light interferometry uses broadband light sources, the problem of dispersion arises. Because the optical paths in the two interferometer arms cannot be balanced for all wavelengths, the white-light correlogram is distorted, which interferes with its evaluation. We investigate the influence of setup parameters on the shape of the correlogram. Calculated values are compared with experimental results.
© 2004 Optical Society of America
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