Abstract
A previously proposed double sinusoidal phase-modulating (DSPM) laser-diode interferometer measures distances larger than a half-wavelength by detecting modulation depth. Although it requires a vibrating mirror to provide the second modulation to the interference signal, such vibrations naturally affect measurement accuracy. We propose a static-type DSPM laser-diode interferometer that uses no mechanical modulation. Our experimental results indicate a measurement error of ±1.6 µm.
© 2003 Optical Society of America
Full Article | PDF ArticleMore Like This
Takamasa Suzuki, Takao Ohizumi, Tatsuhiko Sekimoto, and Osami Sasaki
Appl. Opt. 43(23) 4482-4487 (2004)
Osami Sasaki, Tadahiko Yoshida, and Takamasa Suzuki
Appl. Opt. 30(25) 3617-3621 (1991)
Bofan Wang, Xiangzhao Wang, Osami Sasaki, and Zhongliang Li
Appl. Opt. 51(12) 1939-1944 (2012)