Abstract
Absorption of thin Al2O3 films was measured
at 193 nm with an ArF-laser calorimeter. In addition to the
expected high linear absorption coefficient, we found, for the first
time to our knowledge, that two-photon absorption and transient
color-center formation are nonnegligible loss channels in thin films at
193 nm. The nonlinear absorption coefficient is of the order of
several times 10-4 cm/W.
© 2000 Optical Society of America
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