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Properties of mixed composition Si/ZnSe and ZnSe/LaF3 infrared optical thin films

Natalie S. Gluck, Donald B. Taber, James P. Heuer, Randolph L. Hall, and William J. Gunning

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Abstract

The behavior of codeposited thin films of ZnSe/LaF3 and Si/ZnSe has been investigated. Mixed ZnSe/LaF3 films are polycrystalline with intermediate compositions with moderately high compressive stress (1500–2000 kg/cm2). Mixed Si/ZnSe films are amorphous with intermediate compositions with low compressive stress (<1000kg/cm2). Optical properties of the ZnSe/LaF3 system vary monotonically with composition, but those of the Si/ZnSe system do not, which is explained by the possible chemical reaction of the two species.

© 1992 Optical Society of America

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