Abstract
Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of ∼0.5 μm.
© 1991 Optical Society of America
Full Article | PDF ArticleMore Like This
Osami Sasaki, Hiroyuki Sasazaki, and Takamasa Suzuki
Appl. Opt. 30(28) 4040-4045 (1991)
Takamasa Suzuki, Hiromi Suda, and Osami Sasaki
Appl. Opt. 42(1) 60-66 (2003)
Takamasa Suzuki, Takao Ohizumi, Tatsuhiko Sekimoto, and Osami Sasaki
Appl. Opt. 43(23) 4482-4487 (2004)