R. Russel Austin, Raymond Michaud, Arthur H. Guenther, and Joseph Putman, "Effects of Structure, Composition, and Stress on the Laser Damage Threshold of Homogeneous and Inhomogeneous Single Films and Multilayers," Appl. Opt. 12, 665-676 (1973)
The dependence of a single-shot laser-induced damage on certain film properties is investigated. Variable stress films are produced by mixing pure components with similar damage thresholds; a definite stress dependence is shown. Films formed from mixtures of high and low threshold components are investigated and found to have damage thresholds between the high and low component values. The damage thresholds of multilayer and periodic inhomogeneous film systems are compared. The results confirm that the damage threshold is almost entirely material-dependent and equal to the threshold of the lowest threshold component for highly reflecting multilayers. Multilayers deposited at different vapor incidence angles are compared. A definite dependence is shown.
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Scatter measurements are taken directly from the samples without aluminum overcoating. Measurements are taken at 6328 Å and are not normalized to account for the diffuse reflection component or scattering due to the influence of substrate quality.
O.T. = optical thickness = n × d.
Stress values: (T) indicates tensile stress, (C) indicates compressive stress. Measured using a stress interferometer.
Scatter measurements are taken directly from the samples without aluminum overcoating. Measurements are taken at 6328 Å and are not normalized to account for the diffuse reflection component or scattering due to the influence of substrate quality.
O.T. = optical thickness = n × d.
Stress values: (T) indicates tensile stress, (C) indicates compressive stress. Measured using a stress interferometer.