Abstract
We report the first stroboscopic full-field EUV microscope using high harmonics. Specifically, we demonstrate nanoscale movies of acoustic wave propagation in nanostructures with ≈0.1nm axial resolution, 90nm lateral resolution, and 10fs time resolution.
© 2018 The Author(s)
PDF ArticleMore Like This
Robert M. Karl, Giulia F. Mancini, Dennis Gardner, Elisabeth Shanblatt, Joshua Knobloch, Travis Frazer, Jorge Hernandez-Charpak, Begoña Abad Mayor, Michael Tanksalvala, Christina Porter, Charles Bevis, Daniel Adams, Henry Kapteyn, and Margaret Murnane
JTh5C.8 CLEO: Applications and Technology (CLEO:A&T) 2017
Robert Karl, Giulia Mancini, Dennis Gardner, Joshua Knobloch, Travis Frazer, Jorge N. Hernandez-Charpak, Begoña Abad Mayor, Elisabeth Shanblatt, Michael Tanksalvala, Christina Porter, Charles Bevis, Daniel Adams, Henry Kapteyn, and Margaret M. Murnane
CW1B.2 Computational Optical Sensing and Imaging (COSI) 2017
Christina L. Porter, Michael Tanksalvala, Dennis Gardner, Giulia Mancini, Michael Gerrity, Galen P. Miley, Xiaoshi Zhang, Naoto Horiguchi, Elisabeth Shanblatt, Benjamin Galloway, Yuka Esashi, Charles S. Bevis, Robert Karl, Peter Johnsen, Daniel E. Adams, Henry C. Kapteyn, and Margaret M. Murnane
ET2B.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2018