Abstract
We demonstrate Si3N4 waveguide-coupled microdisk resonators with a loaded Q-factor of 2.4×106 at 1550 nm. We tailor the cavity dispersion by increasing the Si3N4 microdisk thickness and using a thin oxide cladding.
© 2018 The Author(s)
PDF ArticleMore Like This
Paul Kaufmann, Xingchen Ji, Kevin Luke, Michal Lipson, and Sven Ramelow
JTu2A.72 CLEO: Applications and Technology (CLEO:A&T) 2018
Zhichao Ye, Krishna Twayana, Peter A. Andrekson, and Victor Torres-Company
JTh2F.24 CLEO: Applications and Technology (CLEO:A&T) 2020
Xi Wu, Tianren Fan, Ali A. Eftekhar, Amir H. Hosseinnia, and Ali Adibi
FW4D.6 Frontiers in Optics (FiO) 2020