Abstract
Photoacoustic (PA) spectroscopy is a well-established technique and numerous gas sensors designs have been imagined and implemented [1]. The mass deployment of PA gas sensors is often hampered by the systems’ overall size and weight but the technique also possesses favorable detection characteristics when the system dimensions are scaled to a micro-system design. In the framework of the ANR project MIRIADE, the favorable downscaling behavior of PA cells is explored by the miniaturization of PA sensors. The individual components of the sensor, namely tunable quantum cascade lasers, low loss mid infrared (mid-IR) waveguides, and efficient microelectromechanical systems (MEMS) microphones are becoming available in complementary metal-oxide-semiconductor (CMOS) compatible technologies [2]. This paves the way for the joint processes of miniaturization and full integration.
© 2015 IEEE
PDF ArticleMore Like This
B. Parvitte, R. Vallon, and V. Zéninari
JT3A.9 3D Image Acquisition and Display: Technology, Perception and Applications (3D) 2016
V. Zéninari, C. Mohamed Ibrahim, R. Vallon, and B. Parvitte
JM4A.26 3D Image Acquisition and Display: Technology, Perception and Applications (3D) 2018
V. Zéninari, J. Rouxel, B. Parvitte, R. Vallon, M. Brun, S. Nicoletti, and A. Glière
JTu4A.44 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2014