Abstract
The best imaging resolutions of CMOS integrated circuits to date are provided by combining solid-immersion lens (SIL) imaging [1] and two-photon optical-beam-induced current (TOBIC) microscopy [2]. In principle, the performance can be further improved using radially polarized (RP) beams [3], which can be focused to a tighter spot in high-NA microscopes. Here we show how a twisted-nematic liquid-crystal radial polarization converter (RPC) can generate a high quality RP beam [4] to provide sub-100-nm sub-surface imaging resolutions.
© 2015 IEEE
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