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Conferences > CLEOPR > 2015 > 25F2 > 25F2_2
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 25F2_2

Dimensional Metrology for Smart Devices using the Optical Comb of Femtosecond Pulse Lasers

Jonghan Jin, Jungjae Park, Jong-Ahn Kim, and Jaewan Kim

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Abstract

We have proposed the dimensional metrological methods for smart devices using the optical comb of a femtosecond pulse laser. For precision and high speed measurements, these methods were realized based on spectral-domain interferometry.

© 2015 IEEE

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