Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

EUV emission from laser produced plasmas of bismuth, lead and their alloys

Not Accessible

Your library or personal account may give you access

Abstract

Extreme ultraviolet (EUV) spectra from laser produced plasmas of Bi, Pb and Bi-Pb-Sn alloy were recorded in the 10-16 nm spectral region using an 8-ns Nd:YAG laser operating at different laser power densities.

© 2017 Optical Society of America

PDF Article
More Like This
Laser-Produced Plasma EUV Sources

Harry Shields, Richard H. Moyer, Fernando Martos, Stuart McNaught, Randall Pierre, Steven W. Fornaca, and Mark Michaelian
TuD2 Frontiers in Optics (FiO) 2003

Metrology-class EUV light source based on broadband emission from copper-target laser produced plasma

Seth L. Cousin, Feng Dong, Matt Hettermann, Dave Houser, and Patrick Naulleau
ETu6A.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2024

Laser Produced Plasma Light Sources for EUV Lithography

Bruno La Fontaine
AFA4 Conference on Lasers and Electro-Optics: Applications (CLEO:A&T) 2010

Poster Presentation

Media 1: PDF (3611 KB)     
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.