Abstract

In this Letter, we present a method to prepare a mixed electron-beam resist composed of a positive resist (ZEP520A) and $C_{60}$ fullerene. The addition of $C_{60}$ to the ZEP resist changes the material properties under electron beam exposure significantly. An improvement in the thermal resistance of the mixed material has been demonstrated by fabricating multimode interference couplers and coupling regions of microring resonators. The fabrication of distributed Bragg reflector structures has shown improvement in terms of pattern definition accuracy with respect to the same structures fabricated with normal ZEP resist. Straight InP membrane waveguides with different lengths have been fabricated using this mixed resist. A decrease of the propagation loss from 6.6 to $3.3\mathrm{dB}/\mathrm{cm}$ has been demonstrated.

© 2014 Optical Society of America

Experimental observation of lateral emission in freestanding GaN-based membrane devices

Zheng Shi, Xin Li, Xiaojing Fang, Xiaoming Huang, Hongbo Zhu, and Yongjin Wang
Opt. Lett. 39(16) 4931-4933 (2014)

Low-optical-loss, low-resistance Ag/Ge based ohmic contacts to n-type InP for membrane based waveguide devices

L. Shen, V. Dolores-Calzadilla, C.W.H.A. Wullems, Y. Jiao, A. Millan-Mejia, A. Higuera-Rodriguez, D. Heiss, J.J.G.M. van der Tol, H.P.M.M. Ambrosius, G. Roelkens, and M.K. Smit
Opt. Mater. Express 5(2) 393-398 (2015)

Integration of grating couplers with a compact photonic crystal demultiplexer on an InP membrane

Tiziana Stomeo, Frederik Van Laere, Melanie Ayre, Cyril Cambournac, Henri Benisty, Dries Van Thourhout, Roel Baets, and Thomas F. Krauss
Opt. Lett. 33(8) 884-886 (2008)

Low-loss and high index-contrast tantalum pentoxide microring resonators and grating couplers on silicon substrates

Payam Rabiei, Ashutosh Rao, Jeff Chiles, Jichi Ma, and Sasan Fathpour
Opt. Lett. 39(18) 5379-5382 (2014)

Highly efficient metal grating coupler for membrane-based integrated photonics

V. Dolores-Calzadilla, D. Heiss, and M. Smit
Opt. Lett. 39(9) 2786-2789 (2014)