Abstract

Optical phased arrays are versatile components enabling rapid and precise beam steering. An integrated approach is followed in which a 1D optical phased array is fabricated on silicon-on-insulator. The optical phased array consists of 16 parallel grating couplers spaced $2\mu \text{m}$ apart. Steering in one direction is done thermo-optically by means of a titanium electrode on top of the structure using the phased array principle, while steering in the other direction is accomplished by wavelength tuning. At a wavelength of 1550 nm, continuous thermo-optical steering of $2.3°$ and wavelength steering of $14.1°$ is reported.

© 2009 Optical Society of America

On-chip silicon optical phased array for two-dimensional beam steering

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