Abstract
multilayers designed as narrowband reflective coatings near were developed. The highest peak reflectance of 26.2% at a incident angle was obtained at , and the spectral bandwidth was FWHM. The fits for x-ray and extreme ultraviolet reflectance data of multilayers indicate the possibility of silicide formation at the interfaces. , W, and were deposited as interface barrier layers to improve the reflectance of multilayers. More than an 8% increase in reflectance was observed from the interface-engineered and multilayers.
© 2008 Optical Society of America
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