Abstract

We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.

© 2001 Optical Society of America

Phase-map measurements by interferometry with sinusoidal phase modulation and four integrating buckets

Arnaud Dubois
J. Opt. Soc. Am. A 18(8) 1972-1979 (2001)

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