Abstract
We measured an emission of 6 mJ/pulse at 13.5 nm produced by the Lyman- transition excited by a fast capillary discharge, using a lithium hydride capillary. 75% of the energy emanated from a spot size of 0.6 mm. The emission is narrow band and would thus be useful in extreme-ultraviolet lithography imaging systems that use Mo:Si multilayer mirrors. The output within the bandwidth of Mo:Si mirrors was comparable with that of a laser-produced plasma (LPP), and the wallplug efficiency of 0.1% was nearly an order of magnitude better than that of a LPP.
© 1997 Optical Society of America
Full Article | PDF ArticleMore Like This
M. A. Klosner and W. T. Silfvast
Opt. Lett. 23(20) 1609-1611 (1998)
Marc A. Klosner and William T. Silfvast
Appl. Opt. 39(21) 3678-3682 (2000)
Klaus Bergmann, Oliver Rosier, Willi Neff, and Rainer Lebert
Appl. Opt. 39(22) 3833-3837 (2000)