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Polycrystalline anatase titanium dioxide microring resonators with negative thermo-optic coefficient

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Abstract

We fabricate polycrystalline anatase TiO2 microring resonators with loaded quality factors as high as 25,000 and average losses of 0.58dB/mm in the telecommunications band. Additionally, we measure a negative thermo-optic coefficient dn/dT of 4.9±0.5×105K1. The presented fabrication uses CMOS-compatible lithographic techniques that take advantage of substrate-independent, non-epitaxial growth. These properties make polycrystalline anatase a promising candidate for the implementation of athermal, vertically integrated, CMOS-compatible nanophotonic devices for nonlinear applications.

© 2015 Optical Society of America

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