A new data reduction method is presented for single-wavelength ellipsometry. A genetic algorithm is applied to ellipsometric data to find the best fit. The sample consists of a single absorbing layer on a semi-infinite substrate. The genetic algorithm has good convergence and is applicable to many different problems, including those with different independent measurements and situations with more than two angles of incidence. Results are similar to those obtained by other inversion techniques.
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.