Measurement of the Diameter of Opaque Cylinders by Scanning Microscopy

J. A. Dobrowolski; W. Godfrey; P. N. Slater; W. Weinstein

doi:10.1364/JOSA.47.000186

Journal of the Optical Society of America
Vol. 47,
Issue 2,
pp. 186-190
(1957)
•https://doi.org/10.1364/JOSA.47.000186

Measurement of the Diameter of Opaque Cylinders by Scanning Microscopy

J. A. Dobrowolski, W. Godfrey, P. N. Slater, and W. Weinstein

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J. A. Dobrowolski, W. Godfrey, P. N. Slater, and W. Weinstein, "Measurement of the Diameter of Opaque Cylinders by Scanning Microscopy," J. Opt. Soc. Am. 47, 186-190 (1957)

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Abstract

Experiments have been carried out to determine the systematic errors in the measurement of the diameters of opaque cylinders by scanning microscopy. It was found that for cylinders of diameter near the optical resolution limit, the scanning microscope gives too large a size estimate. The variation of the error with aberrations and numerical aperture of the scanning objective, and with the wavelength and state of polarization of the light were determined. Optimum conditions for size determination are suggested.

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Wavelength in μ	NA	E. Polarization relative to scan direction	Half-width in μ	Minimum
0.52	1.33	unpolarized	1.40	0.5
0.52	1.11	unpolarized	1.20	1.0
0.52	0.90	unpolarized	1.25	1.4
0.52	0.64	unpolarized	1.60	3.7
0.52	1.33	perpendicular	1.30	1.2
0.52	1.11	perpendicular	1.05	1.0
0.52	0.90	perpendicular	1.15	1.6
0.52	0.64	perpendicular	1.55	4.3
0.52	1.33	parallel	1.75	1.0
0.52	1.11	parallel	1.45	0.9
0.52	0.90	parallel	1.40	1.2
0.52	0.64	parallel	1.70	3.4
0.42	1.33	unpolarized	1.30	1.5
0.42	1.1	unpolarized	1.05	1.1
0.42	0.90	unpolarized	1.15	1.9
0.42	0.64	unpolarized	1.40	2.65
0.42	1.33	perpendicular	1.15	1.5
0.42	1.11	perpendicular	0.95	1.1
0.42	1.06	perpendicular	0.90	1.3
0.42	0.90	perpendicular	1.05	1.9
0.42	0.64	perpendicular	1.35	3.30
0.42	1.33	parallel	1.45	1.5
0.42	1.11	parallel	1.15	1.05
0.42	1.06	parallel	1.10	1.1
0.42	0.90	parallel	1.20	1.85
0.42	0.64	parallel	1.45	2.40

Wavelength in μ	NA	E. Polarization relative to scan direction	Half-width in μ	Minimum
0.52	1.33	unpolarized	0.65	2.7
0.52	1.1	unpolarized	0.60	2.6
0.52	0.9	unpolarized	0.70	4.2
0.52	0.64	unpolarized	1.20	6.6
0.52	1.33	perpendicular	0.50	3.0
0.52	1.1	perpendicular	0.50	3.1
0.52	0.9	perpendicular	0.60	4.6
0.52	0.64	perpendicular	1.20	7.3
0.52	1.33	parallel	0.75	2.5
0.52	1.1	parallel	0.70	2.2
0.52	0.9	parallel	0.75	3.2
0.52	0.64	parallel	1.15	6.1
0.42	1.33	unpolarized	0.60	1.7
0.42	1.1	unpolarized	0.55	1.8
0.42	0.9	unpolarized	0.45	3.1
0.42	0.64	unpolarized	0.95	5.9
0.42	1.33	perpendicular	0.45	2.0
0.42	1.1	perpendicular	0.40	2.2
0.42	0.9	perpendicular	0.40	3.9
0.42	0.64	perpendicular	1.05	6.6
0.42	1.33	parallel	0.70	1.5
0.42	1.1	parallel	0.60	1.6
0.42	0.9	parallel	0.55	2.5
0.42	0.64	parallel	1.00	5.3

Wavelength in μ	NA	E. Polarization relative to scan direction	Half-width in μ	Minimum
0.52	1.33	unpolarized	1.40	0.5
0.52	1.11	unpolarized	1.20	1.0
0.52	0.90	unpolarized	1.25	1.4
0.52	0.64	unpolarized	1.60	3.7
0.52	1.33	perpendicular	1.30	1.2
0.52	1.11	perpendicular	1.05	1.0
0.52	0.90	perpendicular	1.15	1.6
0.52	0.64	perpendicular	1.55	4.3
0.52	1.33	parallel	1.75	1.0
0.52	1.11	parallel	1.45	0.9
0.52	0.90	parallel	1.40	1.2
0.52	0.64	parallel	1.70	3.4
0.42	1.33	unpolarized	1.30	1.5
0.42	1.1	unpolarized	1.05	1.1
0.42	0.90	unpolarized	1.15	1.9
0.42	0.64	unpolarized	1.40	2.65
0.42	1.33	perpendicular	1.15	1.5
0.42	1.11	perpendicular	0.95	1.1
0.42	1.06	perpendicular	0.90	1.3
0.42	0.90	perpendicular	1.05	1.9
0.42	0.64	perpendicular	1.35	3.30
0.42	1.33	parallel	1.45	1.5
0.42	1.11	parallel	1.15	1.05
0.42	1.06	parallel	1.10	1.1
0.42	0.90	parallel	1.20	1.85
0.42	0.64	parallel	1.45	2.40

Wavelength in μ	NA	E. Polarization relative to scan direction	Half-width in μ	Minimum
0.52	1.33	unpolarized	0.65	2.7
0.52	1.1	unpolarized	0.60	2.6
0.52	0.9	unpolarized	0.70	4.2
0.52	0.64	unpolarized	1.20	6.6
0.52	1.33	perpendicular	0.50	3.0
0.52	1.1	perpendicular	0.50	3.1
0.52	0.9	perpendicular	0.60	4.6
0.52	0.64	perpendicular	1.20	7.3
0.52	1.33	parallel	0.75	2.5
0.52	1.1	parallel	0.70	2.2
0.52	0.9	parallel	0.75	3.2
0.52	0.64	parallel	1.15	6.1
0.42	1.33	unpolarized	0.60	1.7
0.42	1.1	unpolarized	0.55	1.8
0.42	0.9	unpolarized	0.45	3.1
0.42	0.64	unpolarized	0.95	5.9
0.42	1.33	perpendicular	0.45	2.0
0.42	1.1	perpendicular	0.40	2.2
0.42	0.9	perpendicular	0.40	3.9
0.42	0.64	perpendicular	1.05	6.6
0.42	1.33	parallel	0.70	1.5
0.42	1.1	parallel	0.60	1.6
0.42	0.9	parallel	0.55	2.5
0.42	0.64	parallel	1.00	5.3

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Journal of the Optical Society of America