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Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 34,
  • Issue 4,
  • pp. 1322-1327
  • (2016)

Compact Grating Coupler for 700-nm Silicon Nitride Strip Waveguides

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Abstract

700-nm-thick silicon nitride-on-insulator (SNOI) is widely used for nonlinear applications due to its broadband nearly zero flattened dispersion. In this paper, we present a grating coupler for the TE mode of strip waveguides on 700-nm-thick SNOI. Focusing grating structure and inverse taper are combined to reduce the footprint to 70.2 μm × 19.7 μm. The peak coupling efficiency is −3.7 dB and the 1-dB bandwidth is 54 nm. The fabrication process is CMOS-compatible with only one additional etching step required.

© 2015 IEEE

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