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Ellipsometric modeling of serially bi-deposited glancing-angle-deposition coatings

C. Smith, S. MacNally, and J. B. Oliver

Abstract

Ellipsometric modeling of serially bi-deposited glancing-angle-deposition (GLAD) coatings with a high degree of accuracy is imperative for multilayer coatings. High-precision dispersion curves are demonstrated for a wide variety of applications.

© 2019 Optical Society of America

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