Coating stress analysis and compensation for iridium-based x-ray mirrors

Anne-Catherine Probst; Thomas Begou; Thorsten Döhring; Sebastian Zeising; Manfred Stollenwerk; Johannes Stadtmüller; Florian Emmerich; Julien Lumeau

doi:10.1364/AO.57.008775

Applied Optics
Vol. 57,
Issue 29,
pp. 8775-8779
(2018)
•https://doi.org/10.1364/AO.57.008775

Coating stress analysis and compensation for iridium-based x-ray mirrors

Anne-Catherine Probst, Thomas Begou, Thorsten Döhring, Sebastian Zeising, Manfred Stollenwerk, Johannes Stadtmüller, Florian Emmerich, and Julien Lumeau

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Anne-Catherine Probst, Thomas Begou, Thorsten Döhring, Sebastian Zeising, Manfred Stollenwerk, Johannes Stadtmüller, Florian Emmerich, and Julien Lumeau, "Coating stress analysis and compensation for iridium-based x-ray mirrors," Appl. Opt. 57, 8775-8779 (2018)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Check for updates

Abstract

Iridium-based coatings for mirrors of x-ray telescopes are studied. In particular, stress-induced deformation is characterized and shown to be compressive and equal to $- 1786 MPa$ . Two methods for stress compensation are then studied. One relies on the deposition of silica on the back surface of the substrate and a second one relies on the deposition of a chromium sublayer. Advantages and drawbacks of each of these techniques are presented.

Full Article | PDF Article

More Like This

Iridium thin-film coatings for the BabyIAXO hybrid X-ray optic

Peter L. Henriksen, Desiree D. M. Ferreira, Sonny Massahi, Marta C. Civitani, Stefano Basso, Julia Vogel, Jaime R. Armendariz, Erik B. Knudsen, Igor G. Irastorza, and Finn E. Christensen
Appl. Opt. 60(22) 6671-6681 (2021)

Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Tomohiro Ogawa, Yuichiro Ezoe, Teppei Moriyama, Ikuyuki Mitsuishi, Takuya Kakiuchi, Takaya Ohashi, Kazuhisa Mitsuda, and Matti Putkonen
Appl. Opt. 52(24) 5949-5956 (2013)

Bilayer and trilayer X-ray mirror coatings containing W, Pt, or Ir, in combination with C, C/Co, B₄C, or B₄C/Ni: X-ray reflectance, film stress, and temporal stability

David L. Windt, Raymond P. Conley, Eric M. Gullikson, Christian Gollwitzer, Michael Krumrey, and Christian Laubis
Appl. Opt. 62(36) 9568-9576 (2023)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Sample ID	$t_{s}$ (mm)	$t_{f}$ Cr (nm)	$t_{f}$ Ir (nm)	# of Coated Samples
1	1.07	6	0	1
2	1.07	6	19	3
3	1.07	6	30	3
4	1.07	6	49	3
5	1.07	6	97	2

Materials	Linear Fit		2nd Order Polynomial Fit
Materials	K (MPa)	MF	A (MPa)	B ( $MPa \cdot {nm}^{- 1}$ )	MF
Cr	1730	N/A	N/A	N/A	N/A
Ir	−1786	2525	−2143	4.67	1508

Coating	Parameters	Calculated Values		Experimental Values
Coating	Parameters	A-Face	B-Face	A-Face	B-Face
Uncoated	Radius (m)	N/A	N/A	4374	982
Uncoated	Sag (nm)	N/A	N/A	11	51
1-side coated	Radius (m)	N/A	N/A	−115	101
1-side coated	Sag (nm)	N/A	N/A	−434	497
2-side coated	Radius (m)	Infinity	431	5378	1056
2-side coated	Sag (nm)	0	94	8	38

Sample #	Cr-Layer Thickness, nm	Ir-Layer Thickness, nm	Roughness, nm
1	0	0	0.2
2	5	29	0.4
2	90	29	0.7

Sample ID	$t_{s}$ (mm)	$t_{f}$ Cr (nm)	$t_{f}$ Ir (nm)	# of Coated Samples
1	1.07	6	0	1
2	1.07	6	19	3
3	1.07	6	30	3
4	1.07	6	49	3
5	1.07	6	97	2

Abstract

Cited By

Figures (3)

Tables (4)

Equations (5)

Applied Optics